ITEM DESCRIPTION
Consisting of Evaporation,Sputter,Parylene,Glove Box,Loadlock
Tact time 20~80 min Depends on the number of mask
Loading Capacity Glass 1 Sheet, Mask 4 Sheet
Transfer Methode Vacuum Robot
Plasma Treatment Optional
Evaporation Source for Organic (5ea) 10cc for host, 4cc for dopant
Evaporation Source for metal (2ea) Thermal Source, E-Beam is optional
Deposition Uniformity Organic, Metal, Sputter less than ±3%
Max. deposition rate Organic 5A/sec, metal 10A/sec
Rate Accuracy Organic ±5%, Metal ±7%
Thickness reliability Organic & Metal ±5% glass to glass
Conductive Oxide Low Damage Sputtering (FTS or General Sputter)
Doping ratio less than 1% at 1A/sec of host.
Supplier: Sputtering system, oled evaporation system, inline sputter, cluster sputter, batch sputter