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Oled System

(1.3)
Supplier From South Korea (Republic Of Korea)
May-20-13

ITEM DESCRIPTION

Consisting of Evaporation,Sputter,Parylene,Glove Box,Loadlock

Tact time 20~80 min Depends on the number of mask

Loading Capacity Glass 1 Sheet, Mask 4 Sheet

Transfer Methode Vacuum Robot

Plasma Treatment Optional

Evaporation Source for Organic (5ea) 10cc for host, 4cc for dopant

Evaporation Source for metal (2ea) Thermal Source, E-Beam is optional

Deposition Uniformity Organic, Metal, Sputter less than ±3%

Max. deposition rate Organic 5A/sec, metal 10A/sec

Rate Accuracy Organic ±5%, Metal ±7%

Thickness reliability Organic & Metal ±5% glass to glass

Conductive Oxide Low Damage Sputtering (FTS or General Sputter)

Doping ratio less than 1% at 1A/sec of host.

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