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May-20-13
 

2Gen Pe-Cvd System

(1.3)
  Sntek Co., Ltd.
Suwon-Shi, Kyunggi-Do, South Korea (Republic Of Korea)

ITEM DESCRIPTION Substrate Size 156mm² solar wafer, 4pcs Deposition Direction Downward Plasma Source RF & VHF Power Supply Process Gas Any of Requested Gas (Solar : Si3N4,SiO2,Al2O3) Process Temperature ~ 700 C Uniformity ±3% Heating Uniformity ±3% Full Automation Control, Load Lock System

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