Suwon-Shi,
Kyunggi-Do,
South Korea (Republic Of Korea)
ITEM DESCRIPTION
Substrate Size ~ 6inch
Process Gas SiH4,GeH4,B2H6,PH3,Si2H6,H2,Ar
Process Temperature ~ 800 C
Halogen Lamp, Heating Load Lock, System Full Automation Control
Please ask detailed and specific
questions about Pricing, Minimum Order Quantity, Delivery Timelines etc. Detailed Messages
result in prompt responses.
