Plasma enhanced rotational PECVD system,
BTF-1200C-R-PECVD
Product descriptionï¼?
The whole experimental cavity is in the glow generation region, uniform equivalent glow, this technology is a good solution to the traditional plasma work instability, In this way, the range and intensity of ionization is 100 times of that of the traditional PECVD, to the uneven accumulation of materials .
Use a quartz tube of a special shape (thin middle between two ends) as a reaction chamber for chemical vapor deposition.The furnace tube can rotate 360 degrees, Quartz stopper on the inner wall of the tube can help stir-fry the powder material and sintered more evenly, and the furnace body can be tilted to the left and right at a large angle, which is convenient to feed in and out, and the inclined angle is adjustable from 0 to 35 degree.
Widely used in the preparation of graphene at low temperature and the carbon coating experiment of powder material.
Main parameter
Furnace
Max. Tem1200°C
Heating zone length 440mm
Constant zone length 200mm
Tem. control PID automatic control with 30 steps programmableï¼?Operation interface is 7 "industrial control computer
Tube Size Φ60*420+Φ100*360+Φ60*420mm
Furnace body inclination angle 0~35°ï¼?adjustableï¼?
Furnace tube rotation rate 3~13r/min
PE source
Signal frequency 13.56 MHz±0.005%
Power output range 0-500W
Max. reflection power 100W
RF output interface 50 Ω, N-type, female
Power stability â?¤5W
Gas supply system High precision mass Flowmeterï¼?Range optionalï¼?
Accuracy ±1.5%
Response accuracy ±0.2%
Response time Gas characteristicsï¼?1ï½?4sec
Electrical characteristics ï¼?10sec
Working pressure difference range 0.1ï½?0.5MPa
Max. pressure 3MPa
Connection Φ6mmDouble clasp stainless steel joint
Vacuum unit KF25 series bellows and manual stopper valves
Vacuum degree 10-1 pa
The value can be displayed intuitively by the digital display vacuum tester
Main features:
1)Can control the two heating zones individually with two instrument
2)Chamber veined with 12 sets of resistance wire, achieve uniform tem. field and longer constance zone.
3 Equipped with support frame for flange, reduce the load of tube body
4 Pneumatic spring for opening, which is safer for the operator.
5 Open type makes convenient for operation
Technical Parameters
Power
Power rated: 5KW (208-240V)
Voltage
Voltage rated: AC208-240V 50/60HZ
Working Temperature Max. Temperature: 1200 °C
Continuous working temperature: 1100
Heating Rate: °C /min
Temperature Controller
PID automatic control and auto-tune function.
30 programmable segments for precise thermal processing.
Built-in protection for the over-heated and broken thermocouple.Â
Length of heating zone
200+200mm
Length of constant zone
100+100mm
Heating Elements
Resistance wire, Fe-Cr-Al Alloy doped by Mo
Temperature Accuracy
+/- 1 °C
Processing tube
High quartz tube:25/50/60/80/100*1000mm(optional)
Tube blocks are included for blocking heat radiation generated from tube center. Must be fully inserted into the furnace chamber before heating at the correct position. ceramic or quartz blocks are optional
Net Weight 40kg
Dimensions
590*380*500mm(L*W*H without tube & flange)
Vacuum Flange KF25 quick clamp flange
Vacuum Pressure
10-1pa can be achieved by a mechanical pump
10-3 pa can be reached by molecular pump
Compliance
CE Certified
Main Features
ï??Used in Lab as material sintering furnace, annealing furnace, smelting furnace, dental furnace, etc.
ï??It is possible to add a vent to be used as Nitrogen protection furnace, Argon protection furnace, Oxidizing furnace, Carbonizing furnace.
ï??A general necessary electric furnace for experiment in Lab.
Technical Parameters
Power
ï?·Power rated: 4KW (220V)
Voltage
ï?·Voltage rated: AC 220V 50/60HZ
Furnace structure
ï?·High purity fibrous alumina insulation for maximum energy saving - 30% less power consumption than other brands
ï?·Double air cooling structure to control furnace surface Temp. no more than 60 when furnace is heated into max. Temp.
ï?·The spring door buckle is used to solve the contraction gap caused by high temperature in the chamber of the equipment.
ï?·Equipped with inspection window on the front,convenient to to observe the situation inside the chamber
Working Temperature
ï?·Max. Temperature: 1200 °C
ï?·Continuous working temperature: â?¤1100
ï?·Recommended Heating Rate: 5-20°C /min
Max. heating rate
ï?·30/min
Temperature Controller
ï?·PID automatic control and auto-tune function.
ï?·30 programmable segments for precise thermal processing.
ï?·Built-in protection for the over-heated and broken thermocouple.
Thermocouple
ï?·K type
Heating Elements
ï?·Fe-Cr-Al Alloy doped by Mo
Temperature Accuracy
+/- 1 °C
Dimensions
ï?·Chamber size(L*D*H): 250*300*250mm (18L)
Warning
ï?·The equipment is not sealed, and can not be put into toxic, harmful, inflammable and explosive gas. Can add the inlet port to pass through the inert gas or oxygen.
Compliance
ï?·CE Certified
CVD System consists of tube furnace,gas supply system and vacuum unit.
Split vacuum tube furnace
BTF-1200C BTF-1200c can supply vacuum&atmosphere protection environment .
It is easy to installation and dispatch.From the transparent quartz chamber,the state of sintering can be observed.
Pneumatic spring structure make the operator easy to open it.
Tube size Φ50 �1000mm�tube size can be optional)
Heating element Fe-Cr-Alloy adopted by Mo
Zone length Heating :440mm Constant:200mm
Temperature controller *30 programmable segments for precise control of heating rate ,cooling rate and dwell time.
*Built in PID automatic tune function with overheating&brocken thermocouple brocken protection and over temperature protection and alarm allows for operation without attendants.
Accuracy ±1
Suggest heating rate 15/min
Standard accessories quartz tube 1 pcs,stainless steel sealing flange 1set,silicon sealing ring 2set,high temperature glove1pair,quartz block1 pc.
Gas-supply system 3 channels MFC,GMF-3Z
Connector style Double cutting ferrule stainless steel connector
Standard range(N2) 50sccmã??100sccmã??200sccm(optional)
Accuracy ±1.5%FS
Linearity ±0.5ï½?1.5%
Working pressure range 0.1ï½?0.5 MPa
Max.pressure 3MPa
Connector Φ6,1/4''
Display LCD touch screen 3 figrues show
Working tem. environment 5~45 High purity gas
Pressure vacuum gauge -0.1~0.15 MPaï¼?0.01 MPa/gridï¼?
Inter&exter Parabolic ss pipe Φ6
Low vacuum unitï¼?Vau-02
Relative air humidity â?¤85%
Working voltage 220V±10% 50~60HZ
Air bleed rate 8m³/h
Experiment vacuum 1.0X10-1Pa
Oil capacity 1.1L
Inlet/Outlet caliber KF25
Rotation rate 1450rpm
Noise 50dB
Small intelligent type PECVD,PECVD-S-150A
Main featuresï¼?
Small size,full functionï¼?Suitable for laboratory sample preparation and plasma treatment.
Set vacuum unit, gas supply system, RF source, automatic propulsion, heating furnace in on.All the controls are integrated into the touch screen control interface to make the device more intelligent and easy to operate.
Adjustable power range 0-150W; adjustable temperature range: 100-1200 degrees; adjustable sputtering region: 0-1000mm; application: metal film, ceramic film, composite film, continuous growth of various films, etc. Expandable plasma cleaning etching and other functions.
Furnace
Max. temp 1200°C
Heating zone length 440mm
Constant zone length 200mm
Temp. control PID automatic control with 30 steps programmableï¼?Operation interface is 7 "industrial control computer
Tube size Ã? 25ï¼?,Ã?50ï¼?optionalï¼?
PE source:
Signal frequency 13.56 MHz±0.005%
Power output range 0-150W
Gas supply system Accurate control of gas flow with high precision mass Flowmeter
Mass Flowmeter reference rangeï¼?N2) 100sccmã??200sccm 500sccm ï¼?optionalï¼?
Accuracy ±1.5%
Repeatability precision ±0.2%
Working pressure difference range 0.1ï½?0.5 MPa
Max. pressure 3MPa
Vacuum unit KF25 series bellows and manual stopper valves
vacuum 10-1 pa
The value can be displayed intuitively by the digital display vacuum tester
CVD System consists of tube furnace,gas supply system and vacuum unit.
Split vacuum tube furnace
BTF-1200C BTF-1200c can supply vacuum&atmosphere protection environment .
It is easy to installation and dispatch.From the transparent quartz chamber,the state of sintering can be observed.
Pneumatic spring structure make the operator easy to open it.
Tube size Φ50 �1000mm�tube size can be optional)
Heating element Fe-Cr-Alloy adopted by Mo
Zone length Heating :440mm Constant:200mm
Temperature controller *30 programmable segments for precise control of heating rate ,cooling rate and dwell time.
*Built in PID automatic tune function with overheating&brocken thermocouple brocken protection and over temperature protection and alarm allows for operation without attendants.
Accuracy ±1
Suggest heating rate 15/min
Standard accessories quartz tube 1 pcs,stainless steel sealing flange 1set,silicon sealing ring 2set,high temperature glove1pair,quartz block1 pc.
Gas-supply system 3 channels MFC,GMF-3Z
Connector style Double cutting ferrule stainless steel connector
Standard range(N2) 50sccmã??100sccmã??200sccm(optional)
Accuracy ±1.5%FS
Linearity ±0.5ï½?1.5%
Working pressure range 0.1ï½?0.5 MPa
Max.pressure 3MPa
Connector Φ6,1/4''
Display LCD touch screen 3 figrues show
Working tem. environment 5~45 High purity gas
Pressure vacuum gauge -0.1~0.15 MPaï¼?0.01 MPa/gridï¼?
Inter&exter Parabolic ss pipe Φ6
Low vacuum unitï¼?Vau-02
Relative air humidity â?¤85%
Working voltage 220V±10% 50~60HZ
Air bleed rate 8m³/h
Experiment vacuum 1.0X10-1Pa
Oil capacity 1.1L
Inlet/Outlet caliber KF25
Rotation rate 1450rpm
Noise 50dB
