TDS for display can analyze organic thin-film with glass material and it is designed to hold and load the sample according to the form.
IVT has deposition and heating system technology applying various heat sources under high
vacuum and ultra - high vacuum environment.
Differentiated technology is required for qualitative and quantitative measuring analysis of hydrogen using vacuum technology at cutting edge process site including steel metal materials. It is appropriate for small samples under 20 mm 20 mm 3 mm, and it is possible to analyze under the environment such as high temperature range about 1,400 â?? and extreme ultrahigh vacuum less than 5 �? 10-10 mbar.
Outside of that, the TDS device manufacture for special purpose, it provides qualitative and quantitative analysis test report according to the analysis request from external institutions.
- Complex TDS
- SRM in distance, sample in large chamber TDS
- Varied sample features, user specified TDS in demand
IVT has deposition and heating system technology applying various heat sources under high
vacuum and ultra - high vacuum environment.
IVT has deposition and heating system technology applying various heat sources under high
vacuum and ultra - high vacuum environment.
Wafer real - time measuring diagnosis technology development is based on various academicfoundation and highest level technology, and especially, it requires the integration of fusion technology and advanced cutting edge convergence technology such as advanced vacuum technology, impurities measuring diagnosis, extremely pure environment maintenance, process control, mapping and so on.
Outside of that, the TDS device manufacture for special purpose, it provides qualitative and quantitative analysis test report according to the analysis request from external institutions.
- Complex TDS
- SRM in distance, sample in large chamber TDS
- Varied sample features, user specified TDS in demand
aTDS is composed together with EFEM, Wafer Transfer Robot for full automation in 300mm wafer analysis, and possible to be provided as core component of various options as well as QMS such as 100, 200, 300, 500 amu and so on according to the request of customer.
There has been a limitation that existing ceramic ball production type is difficult to apply on proliferation production type for Nuclear Fusion Reactor using lithium titanium oxide because there is a restriction on ball size and impurities generation and so on. lithium titanium oxide (Li2TiO3) is used as a tritium proliferation for Nuclear Fusion Reactor. We developed the production system possible to mass produce more than 50 kg yearly.
There has been a limitation that existing ceramic ball production type is difficult to apply on proliferation production type for Nuclear Fusion Reactor using lithium titanium oxide because there is a restriction on ball size and impurities generation and so on. lithium titanium oxide (Li2TiO3) is used as a tritium proliferation for Nuclear Fusion Reactor. We developed the production system possible to mass produce more than 50 kg yearly.
