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Sending Inquiry For: Large Area Rtp System

May-20-13
Suwon-Shi, Kyunggi-Do, South Korea (Republic Of Korea)
 
ITEM DESCRIPTION

Substrate Size 125mm² 16pcs, 156mm² 9pcs

Heating Source Halogen Lamp

Deposition Direction Up or Downward

Process Temp ~ 1100 C

Heating Uniformity ±5%

Sustain Time More Than 2min. at 1100

Lamping Rate 10 to 20 C / sec

Cooling Rate 5 to 20 C / sec

Gas mixing capability with MFC .
Please ask detailed and specific questions about Pricing, Minimum Order Quantity, Delivery Timelines etc. Detailed Messages result in prompt responses.

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