Differentiated technology is required for qualitative and quantitative measuring analysis of hydrogen using vacuum technology at cutting edge process site including steel metal materials. It is appropriate for small samples under 20 mm 20 mm 3 mm, and it is possible to analyze under the environment such as high temperature range about 1,400 â?? and extreme ultrahigh vacuum less than 5 �? 10-10 mbar.
Wafer real - time measuring diagnosis technology development is based on various academicfoundation and highest level technology, and especially, it requires the integration of fusion technology and advanced cutting edge convergence technology such as advanced vacuum technology, impurities measuring diagnosis, extremely pure environment maintenance, process control, mapping and so on.
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