Characteristics: 80, m focusing range Compact design High resonant frequency Easy to attach on microscopes Flexible use by flex-adapter Optionally feedback sensor Applications: Surface scanning and analysis Afm microscopy Biotechnologye.G.Cell scanning Beam focusing for printing processes Semiconductor test equipment Technical data: Types p72.100s p72.100k Active axes z Integrated sensor sgs Open-loop travel range(0~120v) 80, m, 20% Closed-loop travel range 110, m, 20% Resolution 5 or 2.5nm Closed-loop linearity: 0.1%f.S. Repeatability: 0.05 %f.S. Stiffness in motion direction: 1.4n/, m, 20% Unloaded resonant frequency 350hz, 20% Resonant frequency at 200g 120hz, 20% El.Capacitance3.6, f, 20% Operating temperature range: -20~80 Material stainless steel Mass 150g