Nitrogen Trifluoride NF3 CAS No.: 7783-54-2 EINECS No.: 232-007-1 UN No.: UN2451 Purity: 99.99%-99.995% Dot Class: 2.2 Appearance: Colorless Grade Standard: Electron Grade, Industrial Grade Etching: Nitrogen Trifluoride is used in the plasma etching of silicon wafers. Material: Nitrogen Trifluoride can be used as well with tungsten silicide, and tungsten produced by CVD Laser: Nitrogen Trifluoride is also used in hydrogen fluoride and deuterium fluoride lasers, which are types of chemical lasers. - -
