Product Information Tetrafluoromethane is used in the electronics industry for plasma degreasing of multilayer printed circuit boards. Product specification Product Name Carbon Tetrafluoride Type CF4 Purity n5.0 Cylinder Spec 47L / 470L Fill contens(20C) 31kg / 320kg Fill pressure(20C,-5%) 138 bar Valve type DISS 716 Applications Semiconductor chip,solar cell: Plasma etching gas, used in plasma dry etching process.