Electronic special gases, such as bcl3, cl2, sih4, ph3, chf3, c2f6, cf4, sf6, nf3, n2o, nh3, co2., isotopic gases, such as deuterium gas and tritium gas., rare gases, such as ar, he, ne, kr, xe, super-high purity gases, such as ar, he, h2, n2, o2, laser mixed gases, such as excimer laser gases, photochemical etching gases, , industrial gases, such as lar, ln2, l02.
