Description
Halocarbon 218 (Perfluoropropane)(C3F8) is a colorless, nonflammable, nontoxic gas which is relatively stable and has a faintly sweet odor.
Halocarbon 218 is shipped as a liquefied gas under its Own vapor pressure (103 psig@ 70° F).
Applications
Halocarbon 218 is used for plasma etching. The chemical composition of Halocarbon 218 supplies a higher ratio of Fluorine to Carbon than any
Of the other Halocarbon gases supplied by Electronic Fluorocarbons LLC. When Halocarbon 218 is exposed to the RF field generated in the etch process, a gas plasma is produced that will etch Silicon Dioxide or Silicon Nitrite with exel lent selectivity.
