FS4001 series mass flow sensors are manufactured using MEMS flow sensor and package technology. The sensors are specially designed for low flow rate range applications from 0 ~ 30 sccm up to 0 ~ 1000 sccm. The maximum flow rate for each model is manufactured via specially designed package as well as smart electronics so that the optimal sensitivity would be achieved.
Features and Applications
- Low mass flow range from 0 ~ 30 sccm up to 0 ~ 1000 sccm
- Outstanding accuracy of ±1.5 %
- Fast response (4 ms selectable)
- Pressure rating up to 5 bar (73 psi)
- Analog and/or digital user interface
- Easy installation
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FS1015CL series mass flow sensors are specially designed for medical equipment flow monitor and control applications, and are made with world leading proprietary MEMS mass flow designed channel with a low pressure loss. The current models can be readily applied to ventilators and anesthesia equipments. These sensors can also be sterilized in medical liquids for reuse or hygienic purposes. FS1015 Series can measure a flow up to 150 SLPM. ISO-15mm connection model is readily applicable to ventilators and/or anesthesia equipments. Features and Applications - MEMS thermal mass flow sensor - Excellent rangeability with integrated multiple sensing elements - High stability at null and full scale - Fast response - Low power consumption - Low pressure loss
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FS4003/08 series mass flow sensors are designed for general purpose flow monitor and control applications, and are made with world leading proprietary MEMS mass flow sensors and the smart electronic control system. The sensors directly measure mass flow in the designed channel with a low pressure loss. These sensors can readily be applied for electronics flow meters for anesthesia equipments, clean room air flow or nitrogen flush monitor and control, environmental equipments such as air sampler, analytical instrumentation such as GC spectrometer. FS4008 can be configured to measure flow up to 50 SLPM. It can be applied for gas flow measurement and/or control equipments. Applications include electronic flow meter for anesthesia equipments, clean room gas flow monitor, air sampler, and gas analyzer. Features and Applications - Designed for 3 and 8 mm package - Mass flow detectable from 0 ~ 2 SLPM to 0 ~ 50 SLPM - Exchangeable connectors for easy installation - Digital and analog output provide easy access for various communications - Compact design ready for multiple channel assembly - Excellent for electronic meters in anesthesia equipment - Fast response and low power consumption - Low pressure loss
Fs1015cl gas flow sensors description Fs1015cl mass flow sensors are specially designed for medical equipment flow monitor and control applications, and are made with world leading proprietary mems mass flow designed channel with a low pressure loss. The current models can be readily applied to ventilators and anesthesia equipments. These sensors can also be sterilized in medical liquids for reuse or hygienic purposes. Fs1015 series can measure a flow up to 150 slpm. Iso-15mm connection model is readily applicable to ventilators and/or anesthesia equipments. Fs1015cl gas flow sensors features and applications - mems thermal mass flow sensor - excellent rangeability with integrated multiple sensing elements - high stability at null and full scale - fast response - low power consumption - low pressure loss Fs1015cl gas flow sensors performance specifications * flow range: 0 to 100; 0 to 150slpm * turn-down ratio: > 100 : 1 * accuracy: +/- (2.0 + 0.5 fs) % * repeatability: +/- 0.5% reading * null shift: â± 30mv * output shift: +/- 0.12%/'c * response time: 8 (max.) ms
FS5001B series mass flow sensors are designed for general purpose flow monitoring and control applications. The sensors directly measure mass flow in the designed channel with trace flow detection capability. The lowest flow it can detect is 20 uL/min. These sensors can readily be applied for manifold flow assembly, leak detection, HVAC control, clean room air flow or nitrogen flush monitoring and control, environmental equipments such as air sampler, analytical instrumentation such as GC spectrometer. FS5001 can be configured to measure flow full scale from 100 sccm to 1000 sccm (1 SLPM). With a full spectrum of customizable adaptors, it can be plug-and-play in many applications. Features and Applications - Low mass flow detectable from 0 ~ 200 sccm up to 0 ~ 1000 sccm - Outstanding accuracy of 2.0% - Response time < 10 ms - Pressure rating up to 5 bar (73 psi) - Output: analog or both analog and digital
Mfm2040u digital gas flow sensor description Mfm2000 series is a gas flow sensor with low pressure drop capable of measuring medical gases up to 45 lpm. It is configured to be customizable with different flow inlet and outlet configurations. Mfm2040u digital gas flow sensor features * flow range: 0.04 to 40 slm * operating temperature range: -40 to 85'c * resolution: 15bit * sampling time: 7.5ms * low pressure drop flow sensor * high accuracy +/-2.5% reading * calibrated and temperature compensated for air * low power consumption * digital i2c * made for medical applications * calibrated for air, and o2
FS7002 series mass flow/clog sensors can be used for open air space flow measurement or applied for clog sensing in an open space configuration. The sensor can measure air flow up to 10 m/sec with a fast response. The compact design make the installation an easy task. Examples are clog sensing in LCD projector; HVAC air flow monitoring, air fresher and fan status monitoring. Features and Applications - Measure open space air flow up to 10 m/sec - Fast response < 20 msec - Compact miniature design - Excellent sensitivity - Bi-direction capability - Additional customization available