ITEM DESCRIPTION Application The Cluster type equipment for the manuf acture of CIGS Solarcell. Mo layer-CIGS la yer- IZnO-TCO layer etc. Sequentially form ation. Substrate Type Glass & Wafer Substrate Size ~ 200mm (option) Metal Sputter Mo,ZnO,TCO CIGS Evaporator Cu,In,Ga,Se Using effusion source Glass Heating Max 300
