Characteristics: · 80um focusing range · Compact design · High resonant frequency · Easy to attach on microscopes · Flexible use by flex-adapter · Optionally feedback sensor Applications: · Surface scanning and analysis · Afm microscopy · Biotechnologye.G.Cell scanning · Beam focusing for printing processes · Semiconductor test equipment Technical data: · Types P72.100S P72.100K · Active axes: Z · Integrated sensor: SGS · Travel range(0~120V): 80um · Travel range(0~150V): 100um · Resolution: 5 or 2.5nm · Closed-loop linearity: 0.1%F.S. · Repeatability: 0.05 %F.S. · Stiffness in motion direction: 1.4N/um · Unloaded resonant frequency: 350Hz · Resonant frequency at 200g: 120Hz · El.Capacitance: 3.6uF · Operating temperature range: -20~80 C · Material: stainless steel · Mass: 150g
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