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From
Suwon-Shi,
Kyunggi-Do,
South Korea (Republic Of Korea)
From
Suwon-Shi,
Kyunggi-Do,
South Korea (Republic Of Korea)
ITEM DESCRIPTION
Substrate Size ~ 200mm (Option)
Deposition Direction Downward
Plasma Source RF & VHF Power Supply
Process Gas Any of Requested Gas based on Ar,O2
Process Temperature ~ 700 C
Uniformity ±3%
Heating Uniformity ±3%
Full Automation Control, Load Lock System.
