In case of all Mca e-chuck, Mca heater, ESC, ALN Heater, Magnet Assy
products used in PVD manufacturing process, we offer a various services of refurbishment that are conducted by our own engineers and in-house. Or if customers ask, we provide new one.
Supplier: AMAT ceramic heater, 300mm MCA heater and 200mm MCA puck ESC, magnet