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Icp-Rie

Name: ICP-RIE
Brand: Sntek Co., Ltd.
SKU: N/A
Availability: PreOrder

(1.3)

Sntek Co., Ltd.

Supplier From South Korea (Republic Of Korea)

May-20-13

ITEM DESCRIPTION

Substrate Size ~ 200mm (Option)

Etching Direction Downward

Process Gas Any of Requested Gas Based on Ar,O2,CF4,SF6

Etching Uniformity ±5%

Load Lock System, Full Automation Control

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