Optical Coating Machine Vacuum Equipment For Coating Telescope Mirror
Working principle:ZZS series vacuum coating machine adopt electron gun bombardment materials evaporation technology for work-piece coating ,in order to change workpiece surface performance and get required coating products.
Equipment structure:
Features:
Fully integrated in the machine control platform.
Fully automated coating process and control.
High speed coating process.
Stable productivity and uniformity
Easy job and process set-up and maintenance.
User-friendly control software.
Specification
Model
ZZS1120 Optical Coating Machine
Dimension
Substrate dome Size
Vacuum chamber Structure
Cabinet type single door , 304 stainless steel material
Ultimate vacuum
3¡Á10-4Pa
Restore vacuum
4¡Á10-3Pa,¡Ü12 minutes
Vacuum pumping system
Mechanical pump+ roots pump +diffusion pump
Substrate dome structure
Three or four fan,ball,custom made
Substrate dome rotation speed
3~30 r.p.m
Baking structure
Up barrel heating, down radiation heating
Heating material
Tubular heaters, iodine tungsten lamp
Control mode
Touch Screen,PLC,Manual and Automatic
Temperature
350¡æ
Temperature uniformity
350¡æ ¡À 10 ¡æ
Evaporation source
Resistance evaporation source, electron beam evaporation source.
Working environment requirements
1. Environment temperature:10¡«35¡æ
2 .Relative humidity: no more than 80%
Equipment power requirements
1.Vacuum chamber size| H1500mm,which is made of high grade 304 stainless steel ,inner surface by polishing treatment, surface with cooling water jacket,postposition pumping system vertical front opening door structure,viewing window installed in the door,and equipped with glass panel,vacuum chamber stainless steel plate thickness 1mm ,convenient to clean and maintain,up cover board installed lifting rings,in bleeding point there installed electric throttle flap,and 1 pcs KF40 deflation valve.
2.Substrate holder speed 330rpm AC variable frequency speed regulation(Korea LG) up driven way.Workpiece plate axial and radial runout 2mm;ferrofluidic seal,Bearing adopts Japanese NSK whole substrate holder structure adopts 304 stainless steel.
3.Vacuum pumping system 2sets 28inches diffusion pump+ 1set British Edward Monoblock pump275+1setBritish Edward roots pumpEH2400 and high vacuum pneumatic baffle valve form fast and efficient vacuum pumping system which can meet pumping requirements during coating.Equipped with compound vacuum gauge,which used for measuring high and low vacuum degree.Between valves there is safety interlock to make sure equipment safety use.
6.Vacuum chamber heated by electric heating tube,which can realize automatic control temperature.
7.Equipment base use merchant steel made,surface spray paint, open the door, beautiful decoration.
