1.Vacuum chamber size| H1500mm,which is made of high grade 304 stainless steel ,inner surface by polishing treatment, surface with cooling water jacket,postposition pumping system vertical front opening door structure,viewing window installed in the door,and equipped with glass panel,vacuum chamber stainless steel plate thickness 1mm ,convenient to clean and maintain,up cover board installed lifting rings,in bleeding point there installed electric throttle flap,and 1 pcs KF40 deflation valve. 2.Substrate holder speed 330rpm AC variable frequency speed regulation(Korea LG) up driven way.Workpiece plate axial and radial runout 2mm;ferrofluidic seal,Bearing adopts Japanese NSK whole substrate holder structure adopts 304 stainless steel. 3.Vacuum pumping system 2sets 28inches diffusion pump+ 1set British Edward Monoblock pump275+1setBritish Edward roots pumpEH2400 and high vacuum pneumatic baffle valve form fast and efficient vacuum pumping system which can meet pumping requirements during coating.Equipped with compound vacuum gauge,which used for measuring high and low vacuum degree.Between valves there is safety interlock to make sure equipment safety use. 6.Vacuum chamber heated by electric heating tube,which can realize automatic control temperature. 7.Equipment base use merchant steel made,surface spray paint, open the door, beautiful decoration.