Main application Constant temperature zone : 200mm(¡¨¤1¡æ) Vacuum level:10^-2 torr by mechanical vacuum pump. 10^-5 torr by molecular pump. Leak rate < 5 mtorr / min. Gas flow meter and pressure meter :three gas flow-meters (4% accuracy fs) are installed inside mobile case which are able to monitor gases flowing rate (three different kinds of gases in total) A. Compact direct read flow meter, 10-100 cc/min. B. Compact direct read flow meter, 16-160 cc/min. C. Compact direct read flow meter, 25-250 cc/min.•four pressure meters are installed inside mobile cart which are able to monitor three types of flowing gases pressure as well as the pressure of mixing tank. Max. Power :4.5kw Working voltage:ac220v/110v single phase, 50/60 hz Temperature control:pid automatic control via scr (silicon controlled rectifier) power control, with 50steps programmable Communication interface : rs485 Outside size : 630¡¨¢460¡¨¢560mm Outside size : 630¡¨¢460¡¨¢560mm