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Sending Inquiry For: Ars 5000 Series(Rie)
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questions about Pricing, Minimum Order Quantity, Delivery Timelines etc. Detailed Messages
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Suwon-Shi,
Kyunggi-Do,
South Korea (Republic Of Korea)
ITEM DESCRIPTION
Substrate Size ~ 12.5 inch
Etching Direction Downward
Process Gas Any of Requested Gas Based on Ar,O2,CF4,SF6
Etching Uniformity ±5%
Load Lock System, Full Automation Control
