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Sending Inquiry For: Ars 5000 Series(Rie)

May-20-13
Suwon-Shi, Kyunggi-Do, South Korea (Republic Of Korea)
 
ITEM DESCRIPTION

Substrate Size ~ 12.5 inch

Etching Direction Downward

Process Gas Any of Requested Gas Based on Ar,O2,CF4,SF6

Etching Uniformity ±5%

Load Lock System, Full Automation Control
Please ask detailed and specific questions about Pricing, Minimum Order Quantity, Delivery Timelines etc. Detailed Messages result in prompt responses.

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