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Sending Inquiry For: Large Scale In-Line Sputtering System
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Suwon-Shi,
Kyunggi-Do,
South Korea (Republic Of Korea)
ITEM DESCRIPTION
Substrate Size 156mm² solar wafer, 12pcs(3.5G case, Option)
Sputtering Source based 1set (Option), Aprox 100 x 800m² 8T
Process Gas Ar,O2,N2
Deposition Direction Up or Downward
Al Film Thickness 2m
Uniformity WIW,WTW,RTR ±5%.
