Business area: Electronic special gases, such as bcl3, cl2, sih4, ph3, chf3, c2f6, cf4, sf6, nf3, n2o, nh3, co2. Isotopic gases, such as deuterium gas and tritium gas. Rare gases, such as ar, he, ne, kr, xe and etc. Super-high purity gases, such as ar, he, h2, n2, o2 and etc. Laser mixed gases, such as excimer laser gases, photochemical etching gases, and etc. Industrial gases, such as lar, ln2, l02 and etc. Other gases.
