Synonyms Carbon tetrafluoride (FC-14) Carbon Tetrafluoride, 99.9% Tetrafluoromethane UN 1982 CAS 75-73-0 MF CF4 MW 88 EINECS 200-896-5Â Product Categories Specialty Gases NANJING ZL ENERGY CO.,LTD.specialize in Isobutane R600a, Propylene, Ethane, Cyclopentane, 1-hexene and Isooctane, etc. We look forward to your inquiry if any needs. Usage of Carbon tetrafluoride Used in various plasma etching processes for integrated circuits. Also used as laser gas and refrigerant